How can coating and etching processes be made more efficient, robust, and data-driven? This question was the focus of the industry workshop “Plasma Process Simulation Tools for Industrial Coating and ...

flow of information in the research community will be able to gain the most commercial advantage. Individual companies will no doubt develop proprietary databases and proprietary models of their tools ...

A parametric study reveals more sustainable etch dynamics, chromium mask selectivity, and pathways toward zero-global-warming ...

The distribution function of energetic particles and the time evolution of the frequency spectrum of fluctuations. Initially, the energetic particle distribution function is mountain-like. It slopes ...

Measuring conditions in volatile clouds of superheated gases known as plasmas is central to pursuing greater scientific ...

The most detailed simulation of the chaotic supersonic plasma that floats across our universe has revealed an intricate map of swirling magnetic fields. Clouds of charged particles, or plasmas, are ...

This still image from a new simulation shows how plasma from the pedestal region is connected through the supposedly last confinement surface into the divertor plasma region. The long and thin lobes ...

Visit NAP.edu/10766 to get more information about this book, to buy it in print, or to download it as a free PDF. In spite of its high cost and technical importance, plasma equipment is still largely ...

The exhaust heat generated by a fusing plasma in a commercial-scale reactor may not be as damaging to the vessel's innards as once thought, according to new research about escaping plasma particles.